Lithography

Micralign - Projection Aligner

Spares   -   Refurbish   -   Repair  -   Upgrade

 

Techno-Bit can refurbish and repair many of the parts in the systems for a fraction of the cost to replace them.

 
Perkin  Elmer Mask Aligner

PE500/600/700:

  • X-Y Theta plate assembly refurbishment
  • X-Y Theta flexure repair (Mask and Wafer side
  • Electronic PC Board repair/ Exchange
  • Carrousel, input and output arm repair.
  • Carrousel arm motor assembly (Air or Electric)
  • Chuck repair/ refurbishment.
  • Pre-aligner repair refurbishment.
  • Power supply repair.

Should your company need to repair any of the sub-assemblies please contact us.

 

Upgrading:


Techno-Bit can upgrade your PE500 systems to a PE600 or PE700 micralign system, air track to pick and place, convert your 4" or 5" to a 6"

 

Spare Part Support

We offer a couple of options to our customers. An exchange program for the repairable parts and delivery of parts from a few hours to with in 24 hours of the purchase order issued. These programs offer our customers the convenience of having a large parts support without the overhead of having it in house.

Contact us any time